Inventor
WANG DANNY D
US4 patents
Patents
4 patentsUS12492867B2Dec 9, 2025
Air shrouds with integrated heat exchanger
APPLIED MATERIALS INC0 citations54
US12324061B2Jun 3, 2025
Epitaxial deposition chamber
APPLIED MATERIALS INC0 citations49
US10858735B2Dec 8, 2020
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US10435786B2Oct 8, 2019
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46