Inventor
YANG HONGCHAO
CN14 patents
⚠️ This page may combine multiple inventors who share the name “YANG HONGCHAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ACM RESEARCH SHANGHAI INC
11 patentsUS12111575B2Oct 8, 2024
Coater with automatic cleaning function and coater automatic cleaning method
ACM RESEARCH SHANGHAI INC0 citations62
US11469134B2Oct 11, 2022
Plating chuck
ACM RESEARCH SHANGHAI INC1 citations62
US12467156B2Nov 11, 2025
Plating apparatus and plating method
ACM RESEARCH SHANGHAI INC0 citations61
US11781235B2Oct 10, 2023
Plating apparatus and plating method
ACM RESEARCH SHANGHAI INC0 citations61
US11854842B2Dec 26, 2023
Substrate heat treatment apparatus
ACM RESEARCH SHANGHAI INC0 citations60
US12573019B2Mar 10, 2026
Electroplating chamber leakage plating warning method and system
ACM RESEARCH SHANGHAI INC0 citations59
US11926920B2Mar 12, 2024
Electroplating apparatus and electroplating method
ACM RESEARCH SHANGHAI INC0 citations51
US11008669B2May 18, 2021
Apparatus for holding a substrate
ACM RESEARCH SHANGHAI INC0 citations51
US10816901B2Oct 27, 2020
Coater with automatic cleaning function and coater automatic cleaning method
ACM RESEARCH SHANGHAI INC0 citations51
US11859303B2Jan 2, 2024
Plating apparatus
ACM RESEARCH SHANGHAI INC0 citations49
US10227705B2Mar 12, 2019
Apparatus and method for plating and/or polishing wafer
ACM RESEARCH SHANGHAI INC0 citations40