Inventor
BERCAW CRAIG ALAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “BERCAW CRAIG ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEGAL CORP
9 patentsUS7153542B2Dec 26, 2006
Assembly line processing method
TEGAL CORP650 citations99
US7442615B2Oct 28, 2008
Semiconductor processing system and method
TEGAL CORP18 citations92
US7867905B2Jan 11, 2011
System and method for semiconductor processing
TEGAL CORP13 citations84
US6858085B1Feb 22, 2005
Two-compartment chamber for sequential processing
TEGAL CORP18 citations84
US6921555B2Jul 26, 2005
Method and system for sequential processing in a two-compartment chamber
TEGAL CORP6 citations63
US7074278B2Jul 11, 2006
Removable lid and floating pivot
TEGAL CORP2 citations62
US7049549B2May 23, 2006
Multi-thermal zone shielding apparatus
TEGAL CORP3 citations62
US6844527B2Jan 18, 2005
Multi-thermal zone shielding apparatus
TEGAL CORP3 citations62
US6800254B1Oct 5, 2004
Visual indicator cold trapping system
TEGAL CORP6 citations62
SIMPLUS SYSTEMS CORP
4 patentsUS6610169B2Aug 26, 2003
Semiconductor processing system and method
SIMPLUS SYSTEMS CORP29 citations92
US6572706B1Jun 3, 2003
Integrated precursor delivery system
SIMPLUS SYSTEMS CORP39 citations92
US6221166B1Apr 24, 2001
Multi-thermal zone shielding apparatus
SIMPLUS SYSTEMS CORP18 citations92
US6609632B2Aug 26, 2003
Removable lid and floating pivot
SIMPLUS SYSTEMS CORP2 citations62