Inventor
HUGGINS KEVIN
US4 patents
Patents
4 patentsUS7084960B2Aug 1, 2006
Lithography using controlled polarization
INTEL CORP18 citations80
US7468331B2Dec 23, 2008
Angled elongated features for improved alignment process integration
INTEL CORP4 citations57
US7737420B2Jun 15, 2010
Pixelated modulation of illumination pupil image
INTEL CORP0 citations49
US7315087B2Jan 1, 2008
Angled elongated features for improved alignment process integration
INTEL CORP1 citations46