Inventor
FAN RONGWEI
CN3 patents
Patents
3 patentsUS9269639B2Feb 23, 2016
Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device
SHANGHAI HUALI MICROELECT CORP2 citations54
US8658438B2Feb 25, 2014
Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices
SHANGHAI HUALI MICROELECT CORP0 citations37
US8987013B2Mar 24, 2015
Method of inspecting misalignment of polysilicon gate
SHANGHAI HUALI MICROELECT CORP0 citations36