Inventor

NI QILIANG

CN6 patents

⚠️ This page may combine multiple inventors who share the name “NI QILIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI HUALI MICROELECT CORP

5 patents

US8865482B2Oct 21, 2014

Method of detecting the circular uniformity of the semiconductor circular contact holes

SHANGHAI HUALI MICROELECT CORP37 citations89

US11121045B2Sep 14, 2021

Method for detecting ultra-small defect on wafer surface

SHANGHAI HUALI MICROELECT CORP0 citations54

US9269639B2Feb 23, 2016

Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device

SHANGHAI HUALI MICROELECT CORP2 citations54

US8658438B2Feb 25, 2014

Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices

SHANGHAI HUALI MICROELECT CORP0 citations37

US8987013B2Mar 24, 2015

Method of inspecting misalignment of polysilicon gate

SHANGHAI HUALI MICROELECT CORP0 citations36

SHANGAI HUALI MICROELECTRONICS CORP

1 patent

US9080863B2Jul 14, 2015

Method for monitoring alignment between contact holes and polycrystalline silicon gate

SHANGAI HUALI MICROELECTRONICS CORP0 citations24