P

Inventor

OHWADA TAKUO

JP9 patents
⚠️ This page may combine multiple inventors who share the name “OHWADA TAKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KANTO KAGAKU

5 patents
US9334470B2May 10, 2016

Cleaning liquid composition for electronic device

KANTO KAGAKU3 citations61
US11512397B2Nov 29, 2022

Etchant composition and method for etching

KANTO KAGAKU0 citations53
US11279904B2Mar 22, 2022

Cleaning liquid composition

KANTO KAGAKU0 citations53
US11046910B2Jun 29, 2021

Cleaning solution composition

KANTO KAGAKU1 citations53
US11732365B2Aug 22, 2023

Composition for removing ruthenium

KANTO KAGAKU0 citations51

NEC ELECTRONICS CORP

1 patent
US7368064B2May 6, 2008

Cleaning solution and manufacturing method for semiconductor device

NEC ELECTRONICS CORP2 citations61

RENESAS ELECTRONICS CORP

1 patent
US7943516B2May 17, 2011

Manufacturing method for semiconductor device

RENESAS ELECTRONICS CORP0 citations50

MURAMATSU MASAFUMI

1 patent
US8513140B2Aug 20, 2013

Post-dry etching cleaning liquid composition and process for fabricating semiconductor device

MURAMATSU MASAFUMI0 citations41

OHWADA TAKUO

1 patent
US8105998B2Jan 31, 2012

Liquid composition for removing photoresist residue and polymer residue

OHWADA TAKUO0 citations41