Inventor

TSENG SHENG-HSIANG

TW4 patents

⚠️ This page may combine multiple inventors who share the name “TSENG SHENG-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAI YOU-LIANG

1 patent

US8451078B2May 28, 2013

CMOS-MEMS switch structure

LAI YOU-LIANG17 citations75

NAT APPLIED RES LAB NAT CHIP I

1 patent

US7435663B2Oct 14, 2008

Methods for dicing a released CMOS-MEMS multi-project wafer

NAT APPLIED RES LAB NAT CHIP I3 citations57

CHIU CHIN-FONG

1 patent

US8410480B2Apr 2, 2013

CMOS-MEMS cantilever structure

CHIU CHIN-FONG0 citations45

NAT APPLIED RES LABORATORIES

1 patent

US9702894B2Jul 11, 2017

Monolithic z-axis torsional CMOS MEMS accelerometer

NAT APPLIED RES LABORATORIES0 citations37