Inventor
MARGETIS JOE
US20 patents
⚠️ This page may combine multiple inventors who share the name “MARGETIS JOE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
18 patentsUS9905420B2Feb 27, 2018
Methods of forming silicon germanium tin films and structures and devices including the films
ASM IP HOLDING BV466 citations99
US9647114B2May 9, 2017
Methods of forming highly p-type doped germanium tin films and structures and devices including the films
ASM IP HOLDING BV478 citations99
US10262859B2Apr 16, 2019
Process for forming a film on a substrate using multi-port injection assemblies
ASM IP HOLDING BV413 citations97
US9892913B2Feb 13, 2018
Radial and thickness control via biased multi-port injection settings
ASM IP HOLDING BV464 citations97
US11374112B2Jun 28, 2022
Method for depositing a group IV semiconductor and related semiconductor device structures
ASM IP HOLDING BV2 citations73
US10541333B2Jan 21, 2020
Method for depositing a group IV semiconductor and related semiconductor device structures
ASM IP HOLDING BV2 citations73
US11168395B2Nov 9, 2021
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US10612136B2Apr 7, 2020
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US10446393B2Oct 15, 2019
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
ASM IP HOLDING BV4 citations71
US12363960B2Jul 15, 2025
Method for depositing a Group IV semiconductor and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11557474B2Jan 17, 2023
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation
ASM IP HOLDING BV1 citations62
US11018002B2May 25, 2021
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11004977B2May 11, 2021
Method for depositing a group IV semiconductor and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11996289B2May 28, 2024
Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
ASM IP HOLDING BV0 citations61
US10388509B2Aug 20, 2019
Formation of epitaxial layers via dislocation filtering
ASM IP HOLDING BV0 citations52
US12406846B2Sep 2, 2025
Method for depositing boron and gallium containing silicon germanium layers
ASM IP HOLDING BV0 citations51
US10685834B2Jun 16, 2020
Methods for forming a silicon germanium tin layer and related semiconductor device structures
ASM IP HOLDING BV0 citations51
US12057314B2Aug 6, 2024
Methods for silicon germanium uniformity control using multiple precursors
ASM IP HOLDING BV0 citations47