Inventor
MINAMIDE YU
JP6 patents
Patents
6 patentsUS12142482B2Nov 12, 2024
Vapor deposition method and vapor deposition device
SUMCO CORP0 citations59
US11898246B2Feb 13, 2024
Vapor deposition device
SUMCO CORP1 citations59
US12598956B2Apr 7, 2026
Vapor deposition device and vapor deposition method
SUMCO CORP0 citations48
US12371789B2Jul 29, 2025
Vapor deposition device and carrier used in same
SUMCO CORP0 citations48
US12100590B2Sep 24, 2024
Vapor deposition method and vapor deposition device
SUMCO CORP0 citations48
US11414780B2Aug 16, 2022
Apparatus and method for manufacturing epitaxial wafer
SUMCO CORP0 citations46