Inventor
OYA IZUMI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OYA IZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS6616773B1Sep 9, 2003
Substrate treatment method
MITSUBISHI ELECTRIC CORP47 citations94
US6517998B1Feb 11, 2003
Method for removing photoresist film and apparatus used therefor
MITSUBISHI ELECTRIC CORP21 citations92
US6715944B2Apr 6, 2004
Apparatus for removing photoresist film
MITSUBISHI ELECTRIC CORP16 citations83
US6955178B1Oct 18, 2005
Substrate treatment apparatus
MITSUBISHI ELECTRIC CORP6 citations72
US7965372B2Jun 21, 2011
Apparatus for removing photoresist film
MITSUBISHI ELECTRIC CORP4 citations62