Inventor
ROFLOX ISABELITA
US5 patents
⚠️ This page may combine multiple inventors who share the name “ROFLOX ISABELITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BALSEANU MIHAELA
4 patentsUS8138104B2Mar 20, 2012
Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure
BALSEANU MIHAELA479 citations98
US8129290B2Mar 6, 2012
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
BALSEANU MIHAELA492 citations98
US8148269B2Apr 3, 2012
Boron nitride and boron-nitride derived materials deposition method
BALSEANU MIHAELA22 citations92
US8753989B2Jun 17, 2014
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
BALSEANU MIHAELA5 citations83