Inventor
MATSUSHITA MICHIAKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA MICHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS5964954AOct 12, 1999
Double-sided substrate cleaning apparatus and cleaning method using the same
TOKYO ELECTRON LTD119 citations98
US5518542AMay 21, 1996
Double-sided substrate cleaning apparatus
TOKYO ELECTRON LTD265 citations98
US5375291ADec 27, 1994
Device having brush for scrubbing substrate
TOKYO ELECTRON LTD127 citations98
US5421056AJun 6, 1995
Spin chuck and treatment apparatus using same
TOKYO ELECTRON LTD79 citations96
US6874515B2Apr 5, 2005
Substrate dual-side processing apparatus
TOKYO ELECTRON LTD78 citations94
US5498294AMar 12, 1996
Apparatus and method for washing substrates
TOKYO ELECTRON LTD68 citations94
US6319322B1Nov 20, 2001
Substrate processing apparatus
TOKYO ELECTRON LTD34 citations92
US5686143ANov 11, 1997
Resist treating method
TOKYO ELECTRON LTD31 citations92
US6814809B2Nov 9, 2004
Coating and developing apparatus and pattern forming method
TOKYO ELECTRON LTD16 citations82
US10424499B2Sep 24, 2019
Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
TOKYO ELECTRON LTD2 citations69
US9627237B2Apr 18, 2017
Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
TOKYO ELECTRON LTD4 citations69
US11699608B2Jul 11, 2023
Substrate storage apparatus, substrate storage method, and recording medium
TOKYO ELECTRON LTD1 citations62
US12077392B2Sep 3, 2024
Substrate transfer apparatus and substrate transfer method
TOKYO ELECTRON LTD1 citations54