Inventor

PUGGL MICHAEL

AT6 patents

⚠️ This page may combine multiple inventors who share the name “PUGGL MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FRANK DIETER

2 patents

US8596623B2Dec 3, 2013

Device and process for liquid treatment of a wafer shaped article

FRANK DIETER8 citations82

US9130002B2Sep 8, 2015

Device for holding wafer shaped articles

FRANK DIETER1 citations50

PUGGL MICHAEL

2 patents

US8821681B2Sep 2, 2014

Apparatus and method for wet treatment of disc-like articles

PUGGL MICHAEL6 citations64

US8997764B2Apr 7, 2015

Method and apparatus for liquid treatment of wafer shaped articles

PUGGL MICHAEL2 citations56

LAM RES AG

1 patent

US10658204B2May 19, 2020

Spin chuck with concentrated center and radial heating

LAM RES AG7 citations79

MATSUSHITA MASAICHIRO KEN

1 patent

US8945341B2Feb 3, 2015

Method and device for wet treatment of plate-like articles

MATSUSHITA MASAICHIRO KEN0 citations35