Inventor

LACH OTTO

AT7 patents

⚠️ This page may combine multiple inventors who share the name “LACH OTTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BRUGGER MICHAEL

3 patents

US9190310B2Nov 17, 2015

Grounded chuck

BRUGGER MICHAEL10 citations81

US8608146B2Dec 17, 2013

Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin

BRUGGER MICHAEL14 citations79

US8613288B2Dec 24, 2013

High temperature chuck and method of using same

BRUGGER MICHAEL0 citations49

LAM RES AG

2 patents

US9093482B2Jul 28, 2015

Method and apparatus for liquid treatment of wafer shaped articles

LAM RES AG6 citations71

US9147593B2Sep 29, 2015

Apparatus for liquid treatment of wafer shaped articles

LAM RES AG6 citations70

LACH OTTO

1 patent

US9484229B2Nov 1, 2016

Device and method for processing wafer-shaped articles

LACH OTTO5 citations62

FRANK DIETER

1 patent

US9130002B2Sep 8, 2015

Device for holding wafer shaped articles

FRANK DIETER1 citations50