Inventor
IVANOV ROMAN A
US7 patents
⚠️ This page may combine multiple inventors who share the name “IVANOV ROMAN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
4 patentsUS10676647B1Jun 9, 2020
Composition for tungsten CMP
CABOT MICROELECTRONICS CORP2 citations71
US10988635B2Apr 27, 2021
Composition and method for copper barrier CMP
CABOT MICROELECTRONICS CORP1 citations59
US12227673B2Feb 18, 2025
Composition and method for silicon nitride CMP
CABOT MICROELECTRONICS CORP0 citations58
US10968366B2Apr 6, 2021
Composition and method for metal CMP
CABOT MICROELECTRONICS CORP0 citations47