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Inventor
LIM CHAEMOOK
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “LIM CHAEMOOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
1 patent
US11764087B2
Sep 19, 2023
Process apparatus including a non-contact thermo-sensor
SAMSUNG ELECTRONICS CO LTD
2 citations
64
HEO SEOK
1 patent
US10040192B2
Aug 7, 2018
Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method
HEO SEOK
0 citations
39