Inventor
FREEMAN DEAN W
US13 patents
Patents
13 patentsUS4911103AMar 27, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC167 citations98
US4810673AMar 7, 1989
Oxide deposition method
TEXAS INSTRUMENTS INC156 citations98
US4988533AJan 29, 1991
Method for deposition of silicon oxide on a wafer
TEXAS INSTRUMENTS INC116 citations96
US4916091AApr 10, 1990
Plasma and plasma UV deposition of SiO2
TEXAS INSTRUMENTS INC494 citations96
US4863561ASep 5, 1989
Method and apparatus for cleaning integrated circuit wafers
TEXAS INSTRUMENTS INC98 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4910043AMar 20, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC66 citations93
US4906328AMar 6, 1990
Method for wafer treating
TEXAS INSTRUMENTS INC42 citations92
US4832778AMay 23, 1989
Processing apparatus for wafers
TEXAS INSTRUMENTS INC39 citations92
US4877753AOct 31, 1989
In situ doped polysilicon using tertiary butyl phosphine
TEXAS INSTRUMENTS INC20 citations81
US5096856AMar 17, 1992
In-situ doped silicon using tertiary butyl phosphine
TEXAS INSTRUMENTS INC8 citations73
US5023206AJun 11, 1991
Semiconductor device with adjacent non-oxide layers and the fabrication thereof
TEXAS INSTRUMENTS INC13 citations73
US4882299ANov 21, 1989
Deposition of polysilicon using a remote plasma and in situ generation of UV light.
TEXAS INSTRUMENTS INC18 citations72