Inventor

ESAKI TOMONORI

JP2 patents

Patents

2 patents

US12281390B2Apr 22, 2025

Substrate liquid processing apparatus for supplying temperature-controlled plating liquid

TOKYO ELECTRON LTD0 citations43

US9748100B2Aug 29, 2017

Substrate processing method, storage medium and substrate processing system

TOKYO ELECTRON LTD0 citations35