Inventor
BALAKUMAR SUBRAMANIAN
SG7 patents
Patents
7 patentsUS6830971B2Dec 14, 2004
High K artificial lattices for capacitor applications to use in CU or AL BEOL
CHARTERED SEMICONDUCTOR MFG26 citations92
US6248006B1Jun 19, 2001
CMP uniformity
CHARTERED SEMICONDUCTOR MFG27 citations91
US6663472B2Dec 16, 2003
Multiple step CMP polishing
CHARTERED SEMICONDUCTOR MFG16 citations83
US6649486B1Nov 18, 2003
Method to form shallow trench isolations
CHARTERED SEMICONDUCTOR MFG11 citations71
US6569770B2May 27, 2003
Method for improving oxide erosion of tungsten CMP operations
CHARTERED SEMICONDUCTOR MFG8 citations70
US7095073B2Aug 22, 2006
High K artificial lattices for capacitor applications to use in Cu or Al BEOL
CHARTERED SEMICONDUCTOR MFG4 citations62
US6726545B2Apr 27, 2004
Linear polishing for improving substrate uniformity
CHARTERED SEMICONDUCTOR MFG4 citations59