Inventor

CHENG WING

US3 patents

⚠️ This page may combine multiple inventors who share the name “CHENG WING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

1 patent

US6795292B2Sep 21, 2004

Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber

41 citations88

APPLIED MATERIALS INC

1 patent

US6572814B2Jun 3, 2003

Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas

APPLIED MATERIALS INC21 citations88

KOEHLER FREDERICK

1 patent

US8056858B2Nov 15, 2011

Device and method for providing radiation occlusion and aero-thermal protection

KOEHLER FREDERICK5 citations45