Inventor
WOJTCZAK WILLIAM
US2 patents
Patents
2 patentsUS6692546B2Feb 17, 2004
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS70 citations94
US7029373B2Apr 18, 2006
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS47 citations91