Inventor
LIN HAN-YU
TW35 patents
Patents
35 patentsUS9627258B1Apr 18, 2017
Method of forming a contact
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US11646234B2May 9, 2023
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10950434B2Mar 16, 2021
Methods of reducing gate spacer loss during semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10032887B2Jul 24, 2018
Method of forming a contact
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11855192B2Dec 26, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12336235B2Jun 17, 2025
Semiconductor device having isolation structure formed of low-k dielectric material and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12520558B2Jan 6, 2026
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12471344B2Nov 11, 2025
Dry etching of semiconductor structures with fluorine-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12389619B2Aug 12, 2025
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12336252B2Jun 17, 2025
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12224210B2Feb 11, 2025
Method for FinFet fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12198939B2Jan 14, 2025
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12154970B2Nov 26, 2024
Method for semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12136660B2Nov 5, 2024
Semiconductor device, and method for protecting low-k dielectric feature of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12046676B2Jul 23, 2024
Semiconductor devices and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12033863B2Jul 9, 2024
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12021125B2Jun 25, 2024
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11973129B2Apr 30, 2024
Semiconductor device structure with inner spacer layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11908685B2Feb 20, 2024
Methods of reducing gate spacer loss during semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11830928B2Nov 28, 2023
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11605728B2Mar 14, 2023
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11417751B2Aug 16, 2022
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11373878B2Jun 28, 2022
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222794B2Jan 11, 2022
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11152491B2Oct 19, 2021
Method for forming semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11107904B2Aug 31, 2021
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11056393B2Jul 6, 2021
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12315863B2May 27, 2025
Contact structures in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12288722B2Apr 29, 2025
Spacer structure for semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12136570B2Nov 5, 2024
Graphene layer for low resistance contacts and damascene interconnects
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11545397B2Jan 3, 2023
Spacer structure for semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12062576B2Aug 13, 2024
Semiconductor devices with a rare earth metal oxide layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11201243B2Dec 14, 2021
Nanowire stack GAA device and methods for producing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10847633B2Nov 24, 2020
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12501670B2Dec 16, 2025
Isolation structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50