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Inventor
HAYN ARMIN HEINZ
GB
6 patents
⚠️ This page may combine multiple inventors who share the name “HAYN ARMIN HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEO ELECTRON MICROSCOPY LTD
2 patents
US6781124B2
Aug 24, 2004
Particle detectors
LEO ELECTRON MICROSCOPY LTD
17 citations
88
US6888140B2
May 3, 2005
Particle detectors
LEO ELECTRON MICROSCOPY LTD
8 citations
69
ZEISS CARL SMT LTD
2 patents
US6943352B2
Sep 13, 2005
Particle detectors
ZEISS CARL SMT LTD
7 citations
69
US7777195B2
Aug 17, 2010
Charged particle beam instrument and method of detecting charged particles
ZEISS CARL SMT LTD
0 citations
37
PREIKSZAS DIRK
1 patent
US8405045B2
Mar 26, 2013
Particle beam device with deflection system
PREIKSZAS DIRK
8 citations
82
HAYN ARMIN HEINZ
1 patent
US8890444B2
Nov 18, 2014
Electron gun used in particle beam device
HAYN ARMIN HEINZ
2 citations
50