Inventor
LIN TZE-CHUNG
TW25 patents
Patents
25 patentsUS11646234B2May 9, 2023
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11855192B2Dec 26, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12520558B2Jan 6, 2026
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12471344B2Nov 11, 2025
Dry etching of semiconductor structures with fluorine-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12389619B2Aug 12, 2025
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12336252B2Jun 17, 2025
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12224210B2Feb 11, 2025
Method for FinFet fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12198939B2Jan 14, 2025
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12154970B2Nov 26, 2024
Method for semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12033863B2Jul 9, 2024
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12021125B2Jun 25, 2024
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11973129B2Apr 30, 2024
Semiconductor device structure with inner spacer layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11830928B2Nov 28, 2023
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11605728B2Mar 14, 2023
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11417751B2Aug 16, 2022
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11373878B2Jun 28, 2022
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222794B2Jan 11, 2022
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11152491B2Oct 19, 2021
Method for forming semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11107904B2Aug 31, 2021
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11056393B2Jul 6, 2021
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12217961B2Feb 4, 2025
Hard mask trimming in method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11201243B2Dec 14, 2021
Nanowire stack GAA device and methods for producing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12501670B2Dec 16, 2025
Isolation structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12033895B2Jul 9, 2024
Semiconductor devices and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12513952B2Dec 30, 2025
Method for fabricating a semiconductor device including etching nanostructures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48