Inventor
LEE FANG-WEI
TW32 patents
Patents
32 patentsUS11462471B2Oct 4, 2022
Middle-of-line interconnect structure and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations74
US11646234B2May 9, 2023
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11476365B2Oct 18, 2022
Fin field effect transistor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11227794B2Jan 18, 2022
Method for making self-aligned barrier for metal vias In-Situ during a metal halide pre-clean and associated interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11031291B2Jun 8, 2021
Semiconductor structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11855192B2Dec 26, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12520558B2Jan 6, 2026
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12471344B2Nov 11, 2025
Dry etching of semiconductor structures with fluorine-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12402394B2Aug 26, 2025
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12389619B2Aug 12, 2025
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12334435B2Jun 17, 2025
Middle-of-line interconnect structure and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12336252B2Jun 17, 2025
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12224210B2Feb 11, 2025
Method for FinFet fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12198939B2Jan 14, 2025
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12033863B2Jul 9, 2024
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12021125B2Jun 25, 2024
High selectivity etching with germanium-containing gases
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12009294B2Jun 11, 2024
Middle-of-line interconnect structure and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11972974B2Apr 30, 2024
Self-aligned barrier for metal vias
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11973129B2Apr 30, 2024
Semiconductor device structure with inner spacer layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11842927B2Dec 12, 2023
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11830928B2Nov 28, 2023
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11605728B2Mar 14, 2023
Semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11373878B2Jun 28, 2022
Technique for semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222794B2Jan 11, 2022
Semiconductor fabrication system embedded with effective baking module
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11152491B2Oct 19, 2021
Method for forming semiconductor device structure with inner spacer layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11107904B2Aug 31, 2021
Inner spacer formation in multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11056393B2Jul 6, 2021
Method for FinFET fabrication and structure thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12218219B2Feb 4, 2025
Spacer structure for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12376337B2Jul 29, 2025
Air inner spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11201243B2Dec 14, 2021
Nanowire stack GAA device and methods for producing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10847633B2Nov 24, 2020
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12266538B2Apr 1, 2025
Method for manufacturing semiconductor device using etchant composition having high etching selectivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47