Inventor
WAGGANER ERIC
US3 patents
Patents
3 patentsUS6630407B2Oct 7, 2003
Plasma etching of organic antireflective coating
LAM RES CORP58 citations93
US6949460B2Sep 27, 2005
Line edge roughness reduction for trench etch
LAM RES CORP25 citations90
US6540885B1Apr 1, 2003
Profile control of oxide trench features for dual damascene applications
LAM RES CORP14 citations79