P

Inventor

LE DANIEL

US4 patents
⚠️ This page may combine multiple inventors who share the name “LE DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents
US9779956B1Oct 3, 2017

Hydrogen activated atomic layer etching

LAM RES CORP109 citations96
US6949460B2Sep 27, 2005

Line edge roughness reduction for trench etch

LAM RES CORP25 citations90
US10079154B1Sep 18, 2018

Atomic layer etching of silicon nitride

LAM RES CORP17 citations83

JI BING

1 patent
US8236188B2Aug 7, 2012

Method for low-K dielectric etch with reduced damage

JI BING2 citations59