Inventor
BRUINSMA ANASTASIUS JACOBUS AN
NL10 patents
Patents
10 patentsUS7116401B2Oct 3, 2006
Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method
ASML NETHERLANDS BV49 citations91
US7233384B2Jun 19, 2007
Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor
ASML NETHERLANDS BV10 citations79
US7173270B1Feb 6, 2007
Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.
ASML NETHERLANDS BV15 citations76
US7148494B2Dec 12, 2006
Level sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations72
US6955074B2Oct 18, 2005
Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV7 citations71
US7342644B2Mar 11, 2008
Methods and systems for lithographic beam generation
ASML NETHERLANDS BV4 citations62
US7079225B2Jul 18, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7391676B2Jun 24, 2008
Ultrasonic distance sensors
ASML NETHERLANDS BV3 citations61
US7280228B2Oct 9, 2007
System and method of measurement, system and method of alignment, lithographic apparatus and method
ASML NETHERLANDS BV0 citations47
US7177009B2Feb 13, 2007
Position determination method and lithographic apparatus
ASML NETHERLANDS BV1 citations46