Inventor
KRIJNEN EDWIN EDUARD NICOLAAS
NL4 patents
Patents
4 patentsUS7352472B2Apr 1, 2008
Lithographic apparatus, device manufacturing method, and method for determining z-displacement
ASML NETHERLANDS BV3 citations54
US7280228B2Oct 9, 2007
System and method of measurement, system and method of alignment, lithographic apparatus and method
ASML NETHERLANDS BV0 citations47
US7292310B2Nov 6, 2007
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV1 citations39
US7315032B2Jan 1, 2008
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations33