Inventor
OTTENS CORNELIS CHRISTIAAN
NL3 patents
Patents
3 patentsUS7755742B2Jul 13, 2010
Lithographic apparatus with mounted sensor
ASML NETHERLANDS BV2 citations57
US7307688B2Dec 11, 2007
Clamping device for optical elements, lithographic apparatus with optical elements in a clamping device, and method for manufacturing such apparatus
ASML NETHERLANDS BV4 citations56
US7280228B2Oct 9, 2007
System and method of measurement, system and method of alignment, lithographic apparatus and method
ASML NETHERLANDS BV0 citations47