Inventor
SUI ZHIFENG
CN11 patents
⚠️ This page may combine multiple inventors who share the name “SUI ZHIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS5995235ANov 30, 1999
Bandpass photon detector
APPLIED MATERIALS INC96 citations97
US6559942B2May 6, 2003
Monitoring substrate processing with optical emission and polarized reflected radiation
APPLIED MATERIALS INC63 citations93
US6831742B1Dec 14, 2004
Monitoring substrate processing using reflected radiation
APPLIED MATERIALS INC17 citations92
US6905624B2Jun 14, 2005
Interferometric endpoint detection in a substrate etching process
APPLIED MATERIALS INC6 citations60
(unassigned)
3 patentsUS6829056B1Dec 7, 2004
Monitoring dimensions of features at different locations in the processing of substrates
107 citations96
US6813534B2Nov 2, 2004
Endpoint detection in substrate fabrication processes
54 citations92
US6594068B2Jul 15, 2003
High switching speed digital faraday rotator device and optical switches containing the same
40 citations91