Inventor

CAN LINH

US2 patents

⚠️ This page may combine multiple inventors who share the name “CAN LINH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIMA MASATO

1 patent

US8998552B2Apr 7, 2015

Processing apparatus and processing method

TOSHIMA MASATO5 citations63

LAW KAM S

1 patent

US8617349B2Dec 31, 2013

Showerhead assembly for plasma processing chamber

LAW KAM S6 citations62