Inventor
PRABHU PRASHANT
IN9 patents
⚠️ This page may combine multiple inventors who share the name “PRABHU PRASHANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS9953812B2Apr 24, 2018
Integrated process kit for a substrate processing chamber
APPLIED MATERIALS INC2 citations72
US9909206B2Mar 6, 2018
Process kit having tall deposition ring and deposition ring clamp
APPLIED MATERIALS INC6 citations72
US10648071B2May 12, 2020
Process kit having a floating shadow ring
APPLIED MATERIALS INC1 citations61
US11189472B2Nov 30, 2021
Cathode assembly having a dual position magnetron and centrally fed coolant
APPLIED MATERIALS INC0 citations56