Inventor

LOVELL DANA MARIE

US2 patents

Patents

2 patents

US10745805B2Aug 18, 2020

Plasma resistant coating of porous body by atomic layer deposition

APPLIED MATERIALS INC10 citations82

US10975469B2Apr 13, 2021

Plasma resistant coating of porous body by atomic layer deposition

APPLIED MATERIALS INC3 citations71