Inventor
UM KICHUL
KR3 patents
Patents
3 patentsUS11274369B2Mar 15, 2022
Thin film deposition method
ASM IP HOLDING BV6 citations68
US11414760B2Aug 16, 2022
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same
ASM IP HOLDING BV1 citations55
US12183546B2Dec 31, 2024
Substrate processing apparatus
ASM IP HOLDING BV0 citations43