Inventor

HAN JEUNGHOON

KR2 patents

Patents

2 patents

US11274369B2Mar 15, 2022

Thin film deposition method

ASM IP HOLDING BV6 citations68

US11414760B2Aug 16, 2022

Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same

ASM IP HOLDING BV1 citations55