Inventor
LEE PENG-TING
TW3 patents
Patents
3 patentsUS12557607B2Feb 17, 2026
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12512319B2Dec 30, 2025
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12506004B2Dec 23, 2025
Method of manufacturing a semiconductor device and semiconductor device manufacturing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41