Inventor

WU KWO-HAU

TW4 patents

⚠️ This page may combine multiple inventors who share the name “WU KWO-HAU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAT SCIENCE COUNCIL

3 patents

US6294832B1Sep 25, 2001

Semiconductor device having structure of copper interconnect/barrier dielectric liner/low-k dielectric trench and its fabrication method

NAT SCIENCE COUNCIL42 citations89

US6774461B2Aug 10, 2004

Method of reducing thick film stress of spin-on dielectric and the resulting sandwich dielectric structure

NAT SCIENCE COUNCIL10 citations68

US6903029B2Jun 7, 2005

Method of reducing thick film stress of spin-on dielectric and the resulting sandwich dielectric structure

NAT SCIENCE COUNCIL0 citations47

(unassigned)

1 patent

US6251753B1Jun 26, 2001

Method of sidewall capping for degradation-free damascene trenches of low dielectric constant dielectric by selective liquid-phase deposition