Inventor
WANG SHUO-CHENG
TW2 patents
Patents
2 patentsUS6774461B2Aug 10, 2004
Method of reducing thick film stress of spin-on dielectric and the resulting sandwich dielectric structure
NAT SCIENCE COUNCIL10 citations68
US6903029B2Jun 7, 2005
Method of reducing thick film stress of spin-on dielectric and the resulting sandwich dielectric structure
NAT SCIENCE COUNCIL0 citations47