Inventor

PO CHING-HENG

TW2 patents

Patents

2 patents

US7095544B2Aug 22, 2006

Micromirror and products using the same

TAIWAN SEMICONDUCTOR MFG1 citations49

US7541280B2Jun 2, 2009

Method of foming a micromechanical structure

TAIWAN SEMICONDUCTOR MFG1 citations45