Inventor
CHEN CHIA-CHIANG
TW3 patents
Patents
3 patentsUS7057794B2Jun 6, 2006
Micromirror for MEMS device
TAIWAN SEMICONDUCTOR MFG9 citations71
US7139111B1Nov 21, 2006
Micromirrors for micro-electro-mechanical systems and methods of fabricating the same
TAIWAN SEMICONDUCTOR MFG0 citations49
US7541280B2Jun 2, 2009
Method of foming a micromechanical structure
TAIWAN SEMICONDUCTOR MFG1 citations45