Inventor

UCHIDA NORITAKA

JP9 patents

⚠️ This page may combine multiple inventors who share the name “UCHIDA NORITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

6 patents

US7806989B2Oct 5, 2010

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD24 citations92

US8794250B2Aug 5, 2014

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD3 citations62

US7914626B2Mar 29, 2011

Liquid processing method and liquid processing apparatus

TOKYO ELECTRON LTD4 citations61

US7731799B2Jun 8, 2010

Substrate processing method, substrate processing apparatus and computer-readable memory medium

TOKYO ELECTRON LTD1 citations52

US11084072B2Aug 10, 2021

Substrate processing apparatus, substrate processing method and recording medium

TOKYO ELECTRON LTD0 citations45

US7693597B2Apr 6, 2010

Computer readable storage medium for controlling substrate processing apparatus

TOKYO ELECTRON LTD0 citations41

ORII TAKEHIKO

1 patent

US8337659B2Dec 25, 2012

Substrate processing method and substrate processing apparatus

ORII TAKEHIKO10 citations82

SEKIGUCHI KENJI

1 patent

US8137478B2Mar 20, 2012

Substrate processing method and substrate processing apparatus

SEKIGUCHI KENJI0 citations50

NAKAMORI MITSUNORI

1 patent

US9095953B2Aug 4, 2015

Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrate

NAKAMORI MITSUNORI0 citations45