Inventor
TAYLOR TED L
US5 patents
Patents
5 patentsUS7883907B2Feb 8, 2011
Parameter measurement using multi-layer structures
MICRON TECHNOLOGY INC6 citations68
US7642550B2Jan 5, 2010
Multi-layer structures for parameter measurement
MICRON TECHNOLOGY INC6 citations68
US12462370B2Nov 4, 2025
System for predicting properties of structures, imager system, and related methods
MICRON TECHNOLOGY INC0 citations57
US11869178B2Jan 9, 2024
System for predicting properties of structures, imager system, and related methods
MICRON TECHNOLOGY INC0 citations57
US10872403B2Dec 22, 2020
System for predicting properties of structures, imager system, and related methods
MICRON TECHNOLOGY INC0 citations47