Inventor
KAWASAKI KATSUHIRO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS5209813AMay 11, 1993
Lithographic apparatus and method
HITACHI LTD53 citations94
US6225011B1May 1, 2001
Method for manufacturing semiconductor devices utilizing plurality of exposure systems
HITACHI LTD38 citations92
US4524277AJun 18, 1985
Charged particle beam apparatus
HITACHI LTD23 citations77
US5759423AJun 2, 1998
Electron beam writing method and apparatus for carrying out the same
HITACHI LTD9 citations73
US4710640ADec 1, 1987
Electron beam lithography
HITACHI LTD12 citations72
US5326979AJul 5, 1994
Electron beam lithography system
HITACHI LTD4 citations61