Inventor
ITOH HIROHITO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “ITOH HIROHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS5684856ANov 4, 1997
Stage device and pattern transfer system using the same
CANON KK133 citations97
US5260580ANov 9, 1993
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK115 citations97
US6504160B2Jan 7, 2003
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK20 citations91
US6072183AJun 6, 2000
Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device
CANON KK27 citations91