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Inventor
WU GUAN PING
SG
2 patents
Patents
2 patents
US6251764B1
Jun 26, 2001
Method to form an L-shaped silicon nitride sidewall spacer
CHARTERED SEMICONDUCTOR MFG
60 citations
94
US6277700B1
Aug 21, 2001
High selective nitride spacer etch with high ratio of spacer width to deposited nitride thickness
CHARTERED SEMICONDUCTOR MFG
52 citations
91