Inventor
SHRAUGER VERNON
US3 patents
Patents
3 patentsUS6558976B2May 6, 2003
Critically aligned optical MEMS dies for large packaged substrate arrays and method of manufacture
ANALOG DEVICES INC83 citations93
US6531767B2Mar 11, 2003
Critically aligned optical MEMS dies for large packaged substrate arrays and method of manufacture
ANALOG DEVICES INC74 citations92
US6633426B2Oct 14, 2003
Optical-electrical MEMS devices and method
ANALOG DEVICES INC28 citations84