Inventor
IKUSHIMA TAKAYUKI
JP4 patents
Patents
4 patentsUS6287980B1Sep 11, 2001
Plasma processing method and plasma processing apparatus
MITSUBISHI ELECTRIC CORP186 citations98
US6218196B1Apr 17, 2001
Etching apparatus, etching method, manufacturing method of a semiconductor device, and semiconductor device
MITSUBISHI ELECTRIC CORP41 citations89
US6784743B2Aug 31, 2004
High frequency amplifier and frequency mixer
MITSUBISHI ELECTRIC CORP14 citations82
US7002396B2Feb 21, 2006
Frequency converter
MITSUBISHI ELECTRIC CORP1 citations50