Inventor
DORAN JAMES E
US6 patents
⚠️ This page may combine multiple inventors who share the name “DORAN JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WANG SHEN
2 patentsIBM
2 patentsUS6944578B2Sep 13, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM9 citations69
US6917901B2Jul 12, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM8 citations69